Transfer chamber for flat display device manufacturing apparatus
US7665947B2 · kind B2 · utility
0Cited by
25References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 29, 2008 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Jun 12, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may provide a combination of the functions of a transfer and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, a buffer may be provided and be driven without interference with the robot, and an aligner may be provided to adjust a position of a substrate mounted on the buffer. A sealing member may be provided to seal a hole formed at a predetermined portion of the transfer chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.