Hydrothermal synthesis of cerium-titanium oxide for use in CMP
US7666239B2 · kind B2 · utility
3Cited by
21References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2005 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Apr 3, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/3212
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The present invention provides a method of synthesizing abrasive particles and methods of using the same in chemical mechanical polishing slurry applications. The nanosized abrasive particles according to the invention are produced by hydrothermal synthesis using an insoluble source of cerium. The crystallites of the particles include cerium ions and titanium ions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.