Method and system for high-speed, precise micromachining an array of devices
US7666759B2 · kind B2 · utility
13Cited by
21References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 2006 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Jun 13, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/50
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.