Method and device for inspecting a surface of an optical component
US7667831B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2007 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Nov 9, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/952
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides an inspection system for inspecting a surface of an optical specimen. The inspection system includes an optical testing device having a main body and an optical axis. The optical testing device includes an optical imaging system housed in the main body. The optical imaging system includes imaging components for acquiring a microscope visual image and for acquiring at least one interference fringe image of the surface of the optical specimen. The optical testing device also includes a translational mechanism housed in the main body and configured to allow linear movement of the optical imaging system and to prevent off-axis movement of the optical imaging system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.