Patent · US Active

Multistage vacuum pump and a pumping installation including such a pump

US7670119B2 · kind B2 · utility

1Cited by
3References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 20, 2005
Grant dateMar 2, 2010
Priority date
Expiry dateMar 25, 2028

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF04C23/001
  • WIPO fieldEngines, pumps, turbines
  • WIPO sectorMechanical engineering

Abstract

The present invention provides a multistage vacuum pump comprising at least a low pressure first stage and at least a high pressure second stage. At least one of the stages has at least one suction inlet for admitting gas to be pumped, and at least one of the stages has at least one delivery outlet that is open to the outside for exhausting pumped gas. The first and second stages communicate with each other in order to pass gas from the first stage to the second stage. The first stage operates at a flow rate that is smaller than that of the second stage. For an oil-seal rotary vane positive-displacement pump, the oil is injected into the stage having the greater flow rate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.