Device for treating a container with microwave plasma
US7670453B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 11, 2000 |
| Grant date | Mar 2, 2010 |
| Priority date | — |
| Expiry date | Apr 11, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08J2367/02
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A device for treating with microwave plasma a container. The container is placed in a chamber (12) made of a conductive material and is rotationally symmetrical, and the device includes a wave guide tunnel (15) substantially perpendicular to the axis (A1) of the chamber and which emerges therein in the form of a rectangular window whereof the smaller dimension corresponds to its dimension along the chamber axis. The internal diameter of the chamber (12) is such that the microwaves are propagated in the chamber mainly according to a mode whereby the electric field resulting from the propagation of the microwaves exhibit an axial rotational symmetry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.