Patent · US Active

Methods for purifying alkane liquids

US7671247B2 · kind B2 · utility

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2References

14Claims

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Assignee

E.I. DU PONT DE NEMOURS AND COMPANY · US

Inventors

Robert Clayton Wheland · Wilmington, US
Leo Ernest Manzer · Wilmington, US
Sheng Peng · Wilmington, US

Key dates

Filing date	Sep 13, 2006
Grant date	Mar 2, 2010
Priority date	—
Expiry date	Dec 25, 2027

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC07C2523/46
WIPO fieldOrganic fine chemistry
WIPO sectorChemistry

Abstract

Methods for purifying liquid alkanes are provided. The methods produce alkanes having low absorbance, particularly at 193 nm. The alkane liquids are useful as immersion liquids in photomicrolithography employed for production of electronic circuits.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.