Vertical guided probe array providing sideways scrub motion
US7671610B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 19, 2007 |
| Grant date | Mar 2, 2010 |
| Priority date | — |
| Expiry date | Oct 19, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06755
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Improved probing of closely spaced contact pads is provided by an array of guided vertical probes that has a sideways scrub relative to the line of contact pads. With this orientation of scrub motion, the probes can be relatively thin along the contact line, and relatively thick perpendicular to the contact line. The thin dimension of the probes allows for probing closely spaced contact pads, while the thick dimension of the probes provides mechanical robustness and current carrying capacity. The probes have a predetermined curvature in a plane including the contact line, to help determine the amount of scrub motion during contact. In a preferred embodiment, an array of probes is provided for probing two closely spaced and parallel rows of contact pads, offset from each other by half the contact pad pitch.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.