MEMS oscillator with temperature sensitive MEMS capacitances
US7671710B2 · kind B2 · utility
11Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2008 |
| Grant date | Mar 2, 2010 |
| Priority date | — |
| Expiry date | May 15, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03B5/30
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Provided is an oscillator including: a MEMS resonator for mechanically vibrating; an output oscillator circuit for oscillating at a resonance frequency of the MEMS resonator to output an oscillation signal; and a MEMS capacitor for changing a capacitance thereof caused by a change in a distance between an anode electrode and a cathode beam according to an environmental temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.