Silicon optical device
US7672558B2 · kind B2 · utility
9Cited by
90References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 12, 2004 |
| Grant date | Mar 2, 2010 |
| Priority date | — |
| Expiry date | Apr 17, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12173
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical device can be fabricated by forming a silicon rib, such as a poly-silicon rib, on a SOI substrate so that a portion of the SOI substrate is exposed, and by forming silicon spacers, such as amorphous or poly-silicon spacers, that round off corners of the silicon rib.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.