Cantilever probe and applications of the same
US7677088B2 · kind B2 · utility
8Cited by
7References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 28, 2007 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Oct 4, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of fabricating a nanoscale cantilever probe. In one embodiment, the method includes the steps of forming a cantilever having a tip vertically extending from an end portion of the cantilever, where the tip has an apex portion having a size in a range of about 1-1000 nm, and selectively doping the cantilever with a dopant to define a first doping region in the tip and a second doping region in the rest of the cantilever, where the dopant concentration of the first doping region is substantially lower than that of the second doping region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.