Integrated microelectromechanical systems (MEMS) vibrating mass Z-axis rate sensor
US7677099B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2007 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Dec 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor that measures angular velocity about an axis that is normal to a sensing plane of the sensor. The sensor comprises a sensing subassembly that includes a planar frame parallel to the sensing plane, a first proof mass disposed in the sensing plane, a second proof mass disposed in the sensing plane laterally to the first proof mass, and a linkage within the frame and connected to the frame. The linkage is connected to the first proof mass and to the second proof mass. The sensor further includes actuator for driving the first proof mass and the second proof mass into oscillation along a drive axis in the sensing plane. The sensor further includes a first transducer to sense motion of the frame in response to a Coriolis force acting on the oscillating first proof mass and the oscillating second proof mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.