Composite sensor and acceleration sensor
US7677100B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 29, 2008 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Sep 17, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an acceleration sensor, a first vibrator is arranged on a surface of a substrate such that the vibrator can vibrate in an X-axis direction. An angular-velocity-detecting vibrator is arranged inside the first vibrator such that the vibrator can be displaced in a Y-axis direction. A vibration generating unit and a vibration monitor unit are provided between the substrate and the first vibrator. An angular-velocity-detecting displacement detecting unit is provided between the substrate and the angular-velocity-detecting vibrator. A second vibrator is provided outside the first vibrator such that the vibrator can be displaced in the Y-axis direction. An acceleration-detecting displacement detecting unit is provided between the first and second vibrators. An angular velocity detecting circuit detects angular velocity by performing synchronous detection on a displacement detection signal from the displacement detecting unit using a monitor signal from the vibration monitor unit. On the other hand, an acceleration detecting circuit detects acceleration by performing synchronous detection on a displacement detection signal from the displacement detecting unit using a monitor signal from…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.