Electrostatic actuator and fabrication method
US7677706B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2007 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Apr 28, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
In one embodiment a method of making an electrostatic actuator includes: forming a first conductor over a first substrate to form a first structure; forming a flexible second conductor over a second substrate to form a second structure; forming an etch stop over the first conductor as part of the first structure or over the second conductor as part of the second structure; forming a spacer on the etch stop, the spacer selectively etchable with respect to the etch stop; etching the spacer through to the etch stop at a location of a gap between the first conductor and the second conductor; and bonding the first structure and the second structure together such that the first conductor is located opposite the second conductor across the gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.