Method of forming thick layer by screen printing and method of forming piezoelectric actuator of inkjet head
US7677707B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2006 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Apr 19, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.