Metrology structure and methods
US7678289B2 · kind B2 · utility
0Cited by
6References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2008 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Mar 11, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C99/0065
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of indicating the progress of a sacrificial material removal process, the method, comprising; freeing a portion of a member, the member being disposed in a cage and laterally surrounded by the sacrificial material; and preventing the freed portion of the member from floating away by retaining the freed member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.