Patent · US Active

Electrostatic actuator, device comprising such actuators, microsystem comprising such a device and method for making such an actuator

US7679261B2 · kind B2 · utility

21Cited by

2References

27Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Cedrick Chappaz · Chambéry, FR
Claire Divoux · Grenoble, FR

Key dates

Filing date	Jun 22, 2006
Grant date	Mar 16, 2010
Priority date	—
Expiry date	Oct 26, 2028

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0109
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An electrostatic actuator including: at least one fixed electrode, fixed with respect to a substrate; at least one flexible electrode arranged to face the substrate; a pivot member extending from the flexible electrode, the pivot member being fixed to a face of the flexible electrode facing the fixed electrode, and the pivot member being made from a conducting material; and at least one suspending unit suspending the flexible electrode and holding the flexible electrode at rest at a distance from the substrate, wherein the suspending unit and the pivot member are different.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.