Monolithic piezo actuator with a change in the electrode structure in the junction region, and use of the piezo actuator

US7679274B2 · kind B2 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Harald Kastl · Wolfsberg, AT
• Carsten Schuh · Baldham, DE

Key dates

• Filing date: Jul 26, 2006
• Grant date: Mar 16, 2010
• Expiry date: Oct 18, 2026

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42

Abstract

A piezo actuator in a monolithic multilayer design, has at least one piezoelectrically active stack element, wherein the stack element has stacked piezoceramic layers made of piezoceramic material and electrode layers arranged between the piezoceramic layers, at least one piezoelectrically inactive terminating region arranged above the stack element, and at least one junction region arranged between the stack element and the terminating region, wherein the stack element, the terminating region and the junction region are connected to one another to form a monolithic total stack. The junction region has stacked piezoceramic layers and electrode layers arranged between the piezoceramic layers, and the piezoceramic layers and the electrode layers are in a form and are arranged on one another such that in the stack direction of the junction region one piezoelectrically active area per junction piezoceramic layer is successively changed from piezoceramic layer to piezoceramic layer.