Detection sensor and resonator
US7681433B2 · kind B2 · utility
8Cited by
6References
21Claims
0Family size
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Key dates
| Filing date | May 26, 2006 |
| Grant date | Mar 23, 2010 |
| Priority date | — |
| Expiry date | Mar 31, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N29/036
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
By using a disc type resonator, a sensor detects a substance having a mass and the mass with high sensitivity. Moreover, it is preferable to detect a change in vibrations of a substance attached or adsorbed to an area having a vibration amplitude equal to or larger than a constant value. This disc type resonator can be fabricated by the MEMS technique by using single-crystal or polycrystalline Si as a structural material. To improve the attachment efficiency of molecules and the like to be detected, irregularity or a groove is preferably provided on the surface of the disc type resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.