Patent · US Active

Arrangement for monitoring the leak-tightness of an evacuated space

US7681435B2 · kind B2 · utility

6Cited by
12References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 4, 2008
Grant dateMar 23, 2010
Priority date
Expiry dateFeb 17, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01M3/283
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An arrangement for monitoring the leak-tightness of an evacuated space which is hermetically closed, leak-tight, by means of at least one metallic wall is specified. A device which is connected to the evacuated space indicates an inadmissible pressure rise in the evacuated space caused by a leak in the wall. The device includes a metallic bellows, which is hermetically connected, leak-tight, to the evacuated space, and an electrical proximity switch to which an evaluation unit is connected. The proximity switch (7) is mounted, in the direction of movement of the bellows (5), at a distance from the end face of the latter, the size of which is varied as a function of the respective axial length of the bellows (5). A tube (9) connected fixedly to the wall (2) is mounted around the bellows (5), so as to maintain an air gap, surrounds the bellows (5) in a moisture-tight manner and is longer than the bellows (5) in its longest initial position corresponding to the expanded state. The proximity switch (7) projects into the tube (9) so as to be sealed off with respect to the latter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.