Method for making carbon nanotube array
US7682658B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 8, 2006 |
| Grant date | Mar 23, 2010 |
| Priority date | — |
| Expiry date | Jan 17, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/605
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate with a film of a first catalyst thereon; (b) disposing the substrate in a quartz boat; (c) disposing a second catalyst adjacent to the substrate in the quartz boat; (d) disposing the quartz boat in a reaction chamber having a gas inlet configured for introducing a carbon source gas and a carrier gas into the reaction chamber and a gas outlet; (e) heating the reaction chamber to a predetermined temperature and introducing the carbon source gas into the reaction chamber along a direction from the second catalyst to the substrate, whereby the second catalyst reacts with the carbon source gas thereby producing a resultant for promoting catalytic activity of the first catalyst; and (f) growing an array of carbon nanotubes on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.