Laser atom probe
US7683318B2 · kind B2 · utility
11Cited by
2References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2004 |
| Grant date | Mar 23, 2010 |
| Priority date | — |
| Expiry date | Mar 3, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2855
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.