Patent · US Active

Fiber optic seismic sensor based on MEMS cantilever

US7684051B2 · kind B2 · utility

3Cited by
218References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 18, 2007
Grant dateMar 23, 2010
Priority date—
Expiry dateMay 13, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01V1/184
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A dual cantilevered beam structure is attached to a silicon frame. An optical fiber extends from a borosilicate wafer bonded to the bottom of the frame. A second borosilicate wafer is bonded to the top of the frame. The bottom borosilicate wafer is bonded to the optical fiber with a bonding agent having an index of refraction between the refractive index of the fused silica optical fiber and the refractive index of the borosilicate wafer. In an embodiment, the bonding agent has a refractive index substantially similar to optical cement. Light is reflected into the optical fiber from the beam structure for measuring seismic changes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.