Single piece Fabry-Perot optical sensor and method of manufacturing the same
US7684657B2 · kind B2 · utility
55Cited by
2References
58Claims
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Key dates
| Filing date | Aug 8, 2006 |
| Grant date | Mar 23, 2010 |
| Priority date | — |
| Expiry date | Sep 27, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/093
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical sensor and a method of manufacturing such as sensor are provided. The sensor includes a lead optical fiber with a single piece optical element joined permanently joined to its forward end. The optical element defines a spacer with a cavity therein at one end, and a diaphragm at the opposite end. The diaphragm is flexible in response to a parameter and the sensor defines a sensing Fabry-Perot resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.