Fiber optic pressure sensor for catheter use
US7689071B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2005 |
| Grant date | Mar 30, 2010 |
| Priority date | — |
| Expiry date | Jan 7, 2027 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B5/0215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a miniature robust fiber optic pressure sensor. The miniature fiber optic sensor comprises a Fabry-Perot chip bonded to an optical fiber. The invention provides a new sensor design that reduces the amount of adhesive required to bond the optical fiber to the Fabry-Perot sensor such that the sensor is less sensitive to moisture. The invention also provides manufacturing methods of the sensor comprising a method based on etching and a method based on using an excimer laser. The invention also provides a chip design that renders the chip less sensitive to thermal changes. The invention also provides a chip design in which a sensor diaphragm has a well-defined thickness. The invention also provides a chip design that protects the chip from etching.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.