Patent · US Active

Waveguide structure

US7693384B2 · kind B2 · utility

14Cited by
0References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 29, 2008
Grant dateApr 6, 2010
Priority date
Expiry dateApr 29, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/12007
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A waveguide structure is provided. The waveguide structure includes: a slot channel waveguide including first and second patterns, which are spaced apart from each other to define a slot; a first upper layer covering at least a portion of the slot channel waveguide; and a second upper layer covering the remaining portion of the slot channel waveguide. A thermo-optic coefficient (TOC) of the channel waveguide times a TOC of the second upper layer is a negative number.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.