Noise-component removing method
US7693689B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2007 |
| Grant date | Apr 6, 2010 |
| Priority date | — |
| Expiry date | Nov 6, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2218/04
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A noise-component removing method for removing a noise component from multipoint spectral data that has been generated through measurements performed at measurement points of a sample surface, the method comprising: a PLS analysis step of determining components of the multipoint spectral data for each measurement point in a descending order of eigenvalues of the components by subjecting the multipoint spectral data to multivariate analysis based on the partial least squares regression using a value obtained by quantifying characteristic information about a characteristic of each measurement point, other than spectral information of the measurement point and using the spectral information as an independent variable in the partial least squares regression; and a spectrum reconstruction step of reconstructing the multipoint spectral data for each measurement point to eliminate a component having an eigenvalue lower than a predetermined value, from the components determined in the PLS analysis step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.