Titanium oxide photocatalyst thin film and production method of titanium oxide photocatalyst thin film
US7695774B2 · kind B2 · utility
1Cited by
15References
17Claims
0Family size
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Key dates
| Filing date | May 10, 2005 |
| Grant date | Apr 13, 2010 |
| Priority date | — |
| Expiry date | Feb 20, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2217/71
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention provides a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and a production method for producing a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and comprising a step of radiating excimer beam to the titanium oxide thin film while heating substrate on which the titanium oxide thin film is disposed in vacuum or gas atmosphere in the presence of a silicon-including compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.