Controlled vapor deposition of biocompatible coatings over surface-treated substrates
US7695775B2 · kind B2 · utility
31Cited by
15References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2005 |
| Grant date | Apr 13, 2010 |
| Priority date | — |
| Expiry date | Jan 11, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D3/064
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
We have developed an improved vapor-phase deposition method and apparatus for the application of layers and coatings on various substrates. The method and apparatus are useful in the fabrication of biofunctional devices, Bio-MEMS devices, and in the fabrication of microfluidic devices for biological applications. In one important embodiment, a siloxane substrate surface is treated using a combination of ozone and UV radiation to render the siloxane surface more hydrophilic, and subsequently a functional coating is applied in-situ over the treated surface of the siloxane substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.