Resistive materials for microbolometer, method for preparation of resistive materials and microbolometer containing the resistive materials
US7696478B2 · kind B2 · utility
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3References
4Claims
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Key dates
| Filing date | Jul 30, 2008 |
| Grant date | Apr 13, 2010 |
| Priority date | — |
| Expiry date | Aug 6, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/3464
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided are resistive materials for a microbolometer, a method for preparation of resistive materials and a microbolometer containing the resistive materials. The resistive materials for the microbolometer include an alloy of silicon and antimony or an alloy of silicon, antimony and germanium, which has a high TCR and a low resistance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.