Method of sensing an amount of moisture on a surface of a substrate with temperature compensation
US7696710B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2006 |
| Grant date | Apr 13, 2010 |
| Priority date | — |
| Expiry date | Aug 5, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/048
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining an amount of moisture on a surface of a substrate includes a step of transmitting a transmitter signal to generate a wave. The transmitter signal has a first phase. The wave is propagated to vibrate the surface. Vibrations in the surface are detected and converted into a receiver signal. The receiver signal has a second phase different than the first phase. The method includes the step of sensing the temperature of the substrate. The amount of moisture on the surface is computed based on a phase shift between the transmitter signal and the receiver signal that has been compensated to account for surface temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.