MEMS filter device having a nanosize coupling element and manufacturing method thereof
US7696843B2 · kind B2 · utility
4Cited by
3References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 25, 2005 |
| Grant date | Apr 13, 2010 |
| Priority date | — |
| Expiry date | Aug 5, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/766
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.