Displacement determination system and method using separated imaging areas
US7697724B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 2006 |
| Grant date | Apr 13, 2010 |
| Priority date | — |
| Expiry date | Feb 11, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T7/33
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system including a data acquisition system and a processing system is provided. The data acquisition system is configured to capture a first reference frame that includes a first feature in a first imaging area on a substrate prior to a relative position between the data acquisition system and the substrate being adjusted by approximately a predetermined distance during a first time period, capture a first comparison frame that includes the first feature in a second imaging area on the substrate and a second reference frame that includes a second feature in the first imaging area on the substrate subsequent to the first time period, and capture a second comparison frame that includes the second feature in the second imaging area on the substrate subsequent to the relative position being adjusted by approximately the predetermined distance during a second time period that is subsequent to the first time period. The second imaging area is separated from the first imaging area by the predetermined distance. The processing system is configured to determine a displacement sum using a first displacement between the first feature in the first reference frame and the first feature in the…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.