Patent · US Expired

Method and device for the plasma treatment of workpieces

US7699933B2 · kind B2 · utility

32Cited by
7References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 9, 2003
Grant dateApr 20, 2010
Priority date
Expiry dateJul 26, 2025

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB65G2201/0244
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed and rotating transport path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.