Method and device for the plasma treatment of workpieces
US7699933B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2003 |
| Grant date | Apr 20, 2010 |
| Priority date | — |
| Expiry date | Jul 26, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2201/0244
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed and rotating transport path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.