Fabrication of 3-D ion optics assemblies by metallization of non-conductive substrates
US7700911B1 · kind B1 · utility
0Cited by
4References
17Claims
0Family size
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Key dates
| Filing date | Mar 6, 2006 |
| Grant date | Apr 20, 2010 |
| Priority date | — |
| Expiry date | May 3, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/0018
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cylindrical ion trap (CIT) mass spectrometer constructed using a non-conductive substrate (LTCC) as the basis for the ring electrode. Photolithography and electroless plating were used to create well-defined conductive areas on the LTCC ring electrode. The inventive method allows for the precise control of establishing conductive areas on a non-conductive substrate through the steps of punching, lamination, firing, metallization and photolithography on the metallized layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.