Patent · US Active

Techniques for providing a multimode ion source

US7700925B2 · kind B2 · utility

9Cited by

1References

14Claims

0Family size

Assignee

Varian Semiconductor Equipment Associates, Inc. · US

Inventors

Svetlana B. Radovanov · Marblehead, US
Bon-Woong Koo · Andover, US
Frank Sinclair · Quincy, US
Victor M. Benveniste · Gloucester, US

Key dates

Filing date	Dec 28, 2007
Grant date	Apr 20, 2010
Priority date	—
Expiry date	Oct 19, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/082
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation, the apparatus including an ion source having a hot cathode and a high frequency plasma generator, wherein the ion source has multiple modes of operation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.