Electrostatic chuck with heater and manufacturing method thereof
US7701693B2 · kind B2 · utility
6Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2007 |
| Grant date | Apr 20, 2010 |
| Priority date | — |
| Expiry date | Jan 1, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2237/343
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An electrostatic chuck includes a base. The base has a support portion made of alumina ceramics, and a surface portion made of yttria ceramics. The surface portion forms at least a substrate mounting surface and side surface of the base on a surface of the support portion. Carbon contents in alumina ceramics of the support portion and yttria ceramics of the surface portion are 0.05 wt % or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.