MEMS tuning fork gyro sensitive to rate of rotation about two axes
US7703324B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2007 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Jul 25, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A two-axes rate sensing MEMS system. The system includes two proof masses, two drive components, two drive sense components, two orthogonal sets of substrate electrodes, and a processing device. The processing device is in signal communication with the two proof masses, the two sense components, or the two sets of substrate electrodes. The processing device determines the rate of rotation about two orthogonal axes based on signals received from the two proof masses, the two sense components, or the two substrate electrodes. Rotation about one axis will induce proofmass motion in the plane of the substrate. Rotation about an orthogonal axis will induce proofmass motion out-of-plane of the proofmasses. The sensing scheme independently detects these proof mass motion, which can infer rate of rotation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.