Fabrication of a micro-electromechanical system (MEMS) device from a complementary metal oxide semiconductor (CMOS)
US7704868B2 · kind B2 · utility
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3References
15Claims
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Key dates
| Filing date | Apr 11, 2006 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Sep 15, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
Abstract
Methods of fabricating micro-electromechanical system devices from complementary metal oxide semiconductors (CMOS) are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.