Method and apparatus for detecting a condition of an optical element
US7705292B2 · kind B2 · utility
1Cited by
3References
26Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 13, 2008 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Jun 13, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/045
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A condition or detecting a change in the condition of an optical element of a laser arrangement is detected. An ultrasonic signal is coupled into an optical element such that the ultrasonic signal travels along a path within the optical element, and a transit time or a change in transit time for the ultrasonic signal to travel along the path within the optical element is detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.