Thermal displacement-based radiation detector of high sensitivity
US7705307B1 · kind B1 · utility
15Cited by
6References
24Claims
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Key dates
| Filing date | Feb 27, 2007 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Apr 27, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0896
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A radiation detector comprises an infrared radiation sensing micro mirror array, where each micro mirror is supported with a deformable cantilever beam having an organic layer for increased dynamic range. The radiation detector includes two or more sources of optical radiation for irradiating the micro mirror array, an image sensor array for receiving optical reflection from the micro mirror array, and an aperture plate for (i) spatially restricting optical radiation reaching the micro mirror array and (ii) spatially restricting reflected optical reflection reaching the image sensor array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.