Scintillator panel and radiation image sensor
US7705315B2 · kind B2 · utility
5Cited by
23References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2008 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Jun 16, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/202
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.