Patent · US Active

Semiconductor device and method of manufacturing the same

US7705358B2 · kind B2 · utility

19Cited by
70References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 14, 2007
Grant dateApr 27, 2010
Priority date
Expiry dateDec 25, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/60

Abstract

It is an object to improve operation characteristics and reliability of a semiconductor device. A semiconductor device which includes an island-shaped semiconductor film having a channel-formation region, a first low-concentration impurity region, a second low-concentration impurity region, and a high-concentration impurity region including a silicide layer; a gate insulating film; a first gate electrode overlapping with the channel-formation region and the first low-concentration impurity region with the gate insulating film interposed therebetween; a second gate electrode overlapping with the channel-formation region with the gate insulating film and the first gate electrode interposed therebetween; and a sidewall formed on side surfaces of the first gate electrode and the second gate electrode. In the semiconductor device, a thickness of the gate insulating film is smaller in a region over the second low-concentration impurity region than in a region over the first low-concentration impurity region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.