Highly pure, replaceable wear insert and process for manufacturing the same

US7708827B2 · kind B2 · utility

Assignee

• SGL CARBON SE · DE

Inventors

• Hans-Georg Kahl · Rheinbach, DE
• Jürgen Kessel · Glückstadt, DE
• Helmut Schmitz-Gräpp · Bonn, DE

Key dates

• Filing date: Jan 24, 2003
• Grant date: May 4, 2010
• Expiry date: Jan 6, 2024

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/30
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A highly pure, replaceable wear insert and a process for manufacturing the same use a group of materials which is suitable for meeting the requirements of high temperature semiconductor technology processes and is chosen at the same time for producing thin layers or components therefrom. The materials are compacted and purified at high temperatures in compression molds and the products so produced are put to their intended use. The substantially thin-walled and crucible-shaped, always highly pure components, which are predominantly made of expanded graphite, are employed as a wear insert for protecting graphitic support crucibles from reactive attack by quartz glass crucibles in semiconductor technology processes at temperatures above 500° C.