Capacitor and method of manufacturing the same
US7709342B2 · kind B2 · utility
8Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2005 |
| Grant date | May 4, 2010 |
| Priority date | — |
| Expiry date | Feb 11, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D89/10
Abstract
A capacitor and method of manufacturing the same include an insulating interlayer, a lower electrode, a protection structure, a dielectric layer and an upper electrode. The insulating interlayer may include a conductive pattern formed on a substrate. The lower electrode may be electrically connected to the conductive pattern. The protection structure may be formed on an outer sidewall of the cylindrical lower electrode and on the insulating interlayer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.