Optical assembly with adjustable optical element and independently tunable position sensors
US7709782B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2007 |
| Grant date | May 4, 2010 |
| Priority date | — |
| Expiry date | Nov 12, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device assembly (16) for a precision apparatus (10) includes a device housing (30), a device (32), a device mover assembly (34), and a measurement system (36). The device mover assembly (34) moves the device (32) relative to the device housing (30) about a first axis and about a second axis that is orthogonal to the first axis. The measurement system (36) monitors movement of the device (32). The measurement system (36) monitors movement of the device (32) and can include a first sensor assembly (260) that monitors movement about the first axis and a second sensor assembly (262) that monitors movement about a second axis. Each sensor assembly (260) (262) can include a sensor adjuster (474) (476) that adjusts the position of a portion of the respective sensor assembly (260) (262) to independently tune the sensor assemblies (260) (262) and independently enhance the performance of each sensor assembly (260) (262). Further, each sensor assembly (260) (262) can be a magnetic type sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.