Inductors fabricated from spiral nanocoils and fabricated using noncoil spiral pitch control techniques
US7710235B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2006 |
| Grant date | May 4, 2010 |
| Priority date | — |
| Expiry date | Sep 26, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/01
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Novel applications of nanocoil technology and novel methods of fabricating nanocoils for use in such applications and others. Such applications include inductors or traveling wave tubes fabricated from spiral nanocoils. Such applications includes inductors or traveling wave tubes fabricated from a method for fabricating nanocoils with a desired pitch. Such a method includes determining a desired pitch for fabricated nanocoil, selecting coiling arm orientation in which coiling arm orientation is arm angle between coiling arm an crystalline orientation of underlying substrate, whereby coiling arm orientation affects pitch of fabricated nanocoil, patterning coiling arm structure with selected coiling arm orientation, and, releasing coiling arm, whereby fabricated nanocoil is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.