Microactuator
US7710627B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2008 |
| Grant date | May 4, 2010 |
| Priority date | — |
| Expiry date | Oct 31, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/085
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microactuator including a base frame; and a moving plate having both ends supported by a plurality of elastic support portions inside the base frame, the moving plate having a first side on which a reflective mirror for changing a light path is disposed. At least one first rib is disposed along an edge of a second side of the moving plate, which is the reverse side of the first side of the moving plate, and a second rib is disposed in the center of the second side of the moving plate and correspondingly encloses a permanent magnet. Also, a portion of the second side of the moving plate, except for the first and second ribs, is removed to a predetermined depth to reduce the weight of the entire moving plate and to define the first and second ribs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.