Multi-axis capacitive transducer and manufacturing method for producing it
US7712366B2 · kind B2 · utility
4Cited by
9References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 2005 |
| Grant date | May 11, 2010 |
| Priority date | — |
| Expiry date | Oct 24, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive transducer a first part containing a first set of capacitor plates and a second part relatively movable in a plane to the first part. The second part contains a second set of capacitor plates. Both sets of capacitor plates are built on a substrate, wherein the capacitor plates form a plurality of capacitors. The second part is relatively movable in all six degrees of freedom. One set of the plurality of capacitors measures displacements in a plane and a second set of the plurality capacitors measures displacements perpendicular to the plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.