Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
US7713356B2 · kind B2 · utility
1Cited by
11References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 2001 |
| Grant date | May 11, 2010 |
| Priority date | — |
| Expiry date | Aug 10, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249982
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.